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Air gap-based MEMS switch technology using nickel surface micromachining

dc.contributor.authorEkkels, Phillip
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorCzarnecki, Piotr
dc.contributor.authorPhilipsen, Harold
dc.contributor.authorMertens, Robert
dc.contributor.authorPuers, Bob
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-19T13:21:18Z
dc.date.available2021-10-19T13:21:18Z
dc.date.issued2011
dc.identifier.issn0924-4247
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18865
dc.sourceIIOimport
dc.titleAir gap-based MEMS switch technology using nickel surface micromachining
dc.typeJournal article
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorCzarnecki, Piotr
dc.contributor.imecauthorPhilipsen, Harold
dc.contributor.imecauthorMertens, Robert
dc.contributor.imecauthorPuers, Bob
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecPhilipsen, Harold::0000-0002-5029-1104
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage256
dc.source.endpage263
dc.source.journalSensors and Actuators A: Physical
dc.source.issue2
dc.source.volume166
imec.availabilityPublished - open access


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