dc.contributor.author | Ekkels, Phillip | |
dc.contributor.author | Rottenberg, Xavier | |
dc.contributor.author | Czarnecki, Piotr | |
dc.contributor.author | Philipsen, Harold | |
dc.contributor.author | Mertens, Robert | |
dc.contributor.author | Puers, Bob | |
dc.contributor.author | Tilmans, Harrie | |
dc.date.accessioned | 2021-10-19T13:21:18Z | |
dc.date.available | 2021-10-19T13:21:18Z | |
dc.date.issued | 2011 | |
dc.identifier.issn | 0924-4247 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18865 | |
dc.source | IIOimport | |
dc.title | Air gap-based MEMS switch technology using nickel surface micromachining | |
dc.type | Journal article | |
dc.contributor.imecauthor | Rottenberg, Xavier | |
dc.contributor.imecauthor | Czarnecki, Piotr | |
dc.contributor.imecauthor | Philipsen, Harold | |
dc.contributor.imecauthor | Mertens, Robert | |
dc.contributor.imecauthor | Puers, Bob | |
dc.contributor.imecauthor | Tilmans, Harrie | |
dc.contributor.orcidimec | Philipsen, Harold::0000-0002-5029-1104 | |
dc.contributor.orcidimec | Tilmans, Harrie::0000-0003-4240-4962 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 256 | |
dc.source.endpage | 263 | |
dc.source.journal | Sensors and Actuators A: Physical | |
dc.source.issue | 2 | |
dc.source.volume | 166 | |
imec.availability | Published - open access | |