Authors

El Rifai, Joumana; Sedky, Sherif; Van Hoof, Rita; Severi, Simone; Lin, Dennis; Puers, Bob; Van Hoof, Chris; Witvrouw, Ann

Conference

16th International Conference on Solid-State Sensors, Actuators and Microsystems - TRANSDUCERS

Title

Laser annealed SiGe devices for MEMS applications at temperatures below 250C

Publication type

Proceedings paper