dc.contributor.author | El Rifai, Joumana | |
dc.contributor.author | Witvrouw, Ann | |
dc.contributor.author | Abdel Aziz, Ahmed | |
dc.contributor.author | Puers, Bob | |
dc.contributor.author | Van Hoof, Chris | |
dc.contributor.author | Sedky, Sherif | |
dc.date.accessioned | 2021-10-19T13:22:44Z | |
dc.date.available | 2021-10-19T13:22:44Z | |
dc.date.issued | 2011 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18871 | |
dc.source | IIOimport | |
dc.title | Contact resistivity of laser annealed SiGe for MEMS structural layers deposited at 210C | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Puers, Bob | |
dc.contributor.imecauthor | Van Hoof, Chris | |
dc.source.peerreview | yes | |
dc.source.beginpage | mrsf10-1299-s02- | |
dc.source.conference | Micromechanical Systems - Materials and Devices IV | |
dc.source.conferencedate | 29/11/2010 | |
dc.source.conferencelocation | Boston, MA USA | |
imec.availability | Published - imec | |
imec.internalnotes | MRS Symposium Proceedings; Vol. 1299 | |