Point of use HF purification for silicon surface preparation by ion exchange

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Authors

Fyen, Wim; Mouche, Laurent; Meuris, Marc; Heyns, Marc; Zahka, J.

Issue

6

Journal

Journal of the Electrochemical Society

Volume

144

Title

Point of use HF purification for silicon surface preparation by ion exchange

Publication type

Journal article

Embargo date

9999-12-31

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