Authors

Everaert, Jean-Luc; Rosseel, Erik; Pap, Aron; Meszaros, Albert; Dekoster, Johan; Pavelka, Tibor

ISSN

1071-1023

Issue

1

Journal

Journal of Vacuum Science and Technology B

Volume

29

Title

Noncontact metrology for inversion charge carrier mobility by corona charge and photovoltage measurements on blank wafers with a gate dielectric

Publication type

Journal article