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Articles
Noncontact metrology for inversion charge carrier mobility by corona charge and photovoltage measurements on blank wafers with a gate dielectric
Publication:
Noncontact metrology for inversion charge carrier mobility by corona charge and photovoltage measurements on blank wafers with a gate dielectric
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Date
2011
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Everaert, Jean-Luc
;
Rosseel, Erik
;
Pap, Aron
;
Meszaros, Albert
;
Dekoster, Johan
;
Pavelka, Tibor
Journal
Journal of Vacuum Science and Technology B
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Views
1845
since deposited on 2021-10-19
1
last month
1
last week
Acq. date: 2025-12-12
Citations