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Noncontact metrology for inversion charge carrier mobility by corona charge and photovoltage measurements on blank wafers with a gate dielectric

dc.contributor.authorEveraert, Jean-Luc
dc.contributor.authorRosseel, Erik
dc.contributor.authorPap, Aron
dc.contributor.authorMeszaros, Albert
dc.contributor.authorDekoster, Johan
dc.contributor.authorPavelka, Tibor
dc.date.accessioned2021-10-19T13:27:23Z
dc.date.available2021-10-19T13:27:23Z
dc.date.issued2011
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18890
dc.sourceIIOimport
dc.titleNoncontact metrology for inversion charge carrier mobility by corona charge and photovoltage measurements on blank wafers with a gate dielectric
dc.typeJournal article
dc.contributor.imecauthorEveraert, Jean-Luc
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorDekoster, Johan
dc.source.peerreviewyes
dc.source.beginpage01AB05
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue1
dc.source.volume29
dc.identifier.urlhttp://scitation.aip.org/getpdf/servlet/GetPDFServlet?filetype=pdf&id=JVTBD900002900000101AB05000001&idtype=cvips&doi=10.1116/1.
imec.availabilityPublished - imec


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