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Prospects for 3D strain measurements by NBD

dc.contributor.authorFavia, Paola
dc.contributor.authorBender, Hugo
dc.contributor.authorEneman, Geert
dc.date.accessioned2021-10-19T13:30:01Z
dc.date.available2021-10-19T13:30:01Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18901
dc.sourceIIOimport
dc.titleProspects for 3D strain measurements by NBD
dc.typeMeeting abstract
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorEneman, Geert
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.source.peerreviewno
dc.source.conferenceMicroscopy of Semiconducting Materials - MSM XVII
dc.source.conferencedate4/04/2011
dc.source.conferencelocationCambridge Uk
imec.availabilityPublished - imec


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