Impact of post-litho LWR smoothing processes on the post-etch patterning result

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Authors
Foubert, Philippe; Vaglio Pret, Alessandro; Altamirano Sanchez, Efrain; Gronheid, Roel
Conference
Advances in Resist Materials and Processing Technology XXVIII
Title
Impact of post-litho LWR smoothing processes on the post-etch patterning result
Publication type
Proceedings paper
Embargo date
9999-12-31
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