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Thickness and composition measurements of nanoelectronics multilayer thin films by energy dispersive spectroscopy (EDS)

dc.contributor.authorFranquet, Alexis
dc.contributor.authorConard, Thierry
dc.contributor.authorHantschel, Thomas
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-19T13:37:12Z
dc.date.available2021-10-19T13:37:12Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18929
dc.sourceIIOimport
dc.titleThickness and composition measurements of nanoelectronics multilayer thin films by energy dispersive spectroscopy (EDS)
dc.typeMeeting abstract
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.source.peerreviewno
dc.source.conference15th International Conference on Thin Films - ICTF
dc.source.conferencedate8/11/2011
dc.source.conferencelocationKyoto Japan
imec.availabilityPublished - imec


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