Hydrogen release in annealed hydrogenated a-Si/a-Ge multilayers

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Authors

Frigeri, C.; Serenyi, M.; Khanh, N.Q.; Csik, A.; Erdelyi, Z.; Nasi, L.; Beke, D.L.; Boyen, Hans-Gerd

ISSN

0232-1300

Issue

8

Journal

Crystal Research and Technology

Volume

46

Title

Hydrogen release in annealed hydrogenated a-Si/a-Ge multilayers

Publication type

Journal article

Embargo date

9999-12-31

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