Al2O3 stacks on In0.53Ga0.47As substrates: In situ investigation of the interface

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Authors

Fusi, Matteo; Lamagna, Luca; Spiga, Sabina; Fanciulli, Marco; Brammertz, Guy; Merckling, Clement; Meuris, Marc; Molle, Alessandro

ISSN

0167-9317

Issue

4

Journal

Microelectronic Engineering

Volume

88

Title

Al2O3 stacks on In0.53Ga0.47As substrates: In situ investigation of the interface

Publication type

Journal article

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