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Al2O3 stacks on In0.53Ga0.47As substrates: In situ investigation of the interface

dc.contributor.authorFusi, Matteo
dc.contributor.authorLamagna, Luca
dc.contributor.authorSpiga, Sabina
dc.contributor.authorFanciulli, Marco
dc.contributor.authorBrammertz, Guy
dc.contributor.authorMerckling, Clement
dc.contributor.authorMeuris, Marc
dc.contributor.authorMolle, Alessandro
dc.date.accessioned2021-10-19T13:39:14Z
dc.date.available2021-10-19T13:39:14Z
dc.date.issued2011
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18937
dc.sourceIIOimport
dc.titleAl2O3 stacks on In0.53Ga0.47As substrates: In situ investigation of the interface
dc.typeJournal article
dc.contributor.imecauthorBrammertz, Guy
dc.contributor.imecauthorMerckling, Clement
dc.contributor.imecauthorMeuris, Marc
dc.contributor.orcidimecBrammertz, Guy::0000-0003-1404-7339
dc.contributor.orcidimecMerckling, Clement::0000-0003-3084-2543
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.source.peerreviewyes
dc.source.beginpage435
dc.source.endpage439
dc.source.journalMicroelectronic Engineering
dc.source.issue4
dc.source.volume88
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0167931710004284
imec.availabilityPublished - imec


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