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Single-electron capacitance spectroscopy of individual dopants in silicon

dc.contributor.authorGasseller, M.
dc.contributor.authorDeNinno, M.
dc.contributor.authorLoo, Roger
dc.contributor.authorHarrison, J.F
dc.contributor.authorCaymax, Matty
dc.contributor.authorRogge, S.
dc.contributor.authorTessmer, S.H.
dc.date.accessioned2021-10-19T13:40:47Z
dc.date.available2021-10-19T13:40:47Z
dc.date.issued2011-10
dc.identifier.issn1530-6984
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18943
dc.sourceIIOimport
dc.titleSingle-electron capacitance spectroscopy of individual dopants in silicon
dc.typeJournal article
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorCaymax, Matty
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.date.embargo9999-12-31
dc.identifier.doi10.1021/nl2025163
dc.source.peerreviewyes
dc.source.beginpage5208
dc.source.endpage5212
dc.source.journalNano Letters
dc.source.issue12
dc.source.volume11
imec.availabilityPublished - open access


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