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Ge low-temperature chemical vapor deposition (CVD) using Ge2H6
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Authors
Gencarelli, Federica
;
Vincent, Benjamin
;
Souriau, Laurent
;
Loo, Roger
;
Caymax, Matty
;
Heyns, Marc
Conference
7th International Conference on Silicium Epitaxy and Heterostructures - ICSI-7
Title
Ge low-temperature chemical vapor deposition (CVD) using Ge2H6
Publication type
Oral presentation
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