dc.contributor.author | Gielis, Sven | |
dc.contributor.author | van der Veen, Marleen | |
dc.contributor.author | De Gendt, Stefan | |
dc.contributor.author | Vereecken, Philippe | |
dc.date.accessioned | 2021-10-19T13:44:40Z | |
dc.date.available | 2021-10-19T13:44:40Z | |
dc.date.issued | 2011 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18957 | |
dc.source | IIOimport | |
dc.title | Silver-assisted etching of silicon nanowires | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | van der Veen, Marleen | |
dc.contributor.imecauthor | De Gendt, Stefan | |
dc.contributor.imecauthor | Vereecken, Philippe | |
dc.contributor.orcidimec | van der Veen, Marleen::0000-0002-9402-8922 | |
dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
dc.contributor.orcidimec | Vereecken, Philippe::0000-0003-4115-0075 | |
dc.source.peerreview | no | |
dc.source.beginpage | 49 | |
dc.source.endpage | 58 | |
dc.source.conference | Electroless Deposition Principles, Activation, and Applications | |
dc.source.conferencedate | 10/10/2010 | |
dc.source.conferencelocation | Las Vegas, NV USA | |
dc.identifier.url | http://dx.doi.org/10.1149/1.3551490 | |
imec.availability | Published - imec | |
imec.internalnotes | ECS Transactions; Vol. 33, Issue 18 | |