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Atom probe analysis of a 3D-finfet with high-k metal gate

dc.contributor.authorGilbert, Matthieu
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorKoelling, Sebastian
dc.contributor.authorKambham, Ajay Kumar
dc.date.accessioned2021-10-19T13:45:44Z
dc.date.available2021-10-19T13:45:44Z
dc.date.issued2011
dc.identifier.issn0304-3991
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18961
dc.sourceIIOimport
dc.titleAtom probe analysis of a 3D-finfet with high-k metal gate
dc.typeJournal article
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewyes
dc.source.beginpage530
dc.source.endpage534
dc.source.journalUltramicroscopy
dc.source.issue6
dc.source.volume111
imec.availabilityPublished - imec


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