Atom probe analysis of a 3D-finfet with high-k metal gate

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Authors

Gilbert, Matthieu; Vandervorst, Wilfried; Koelling, Sebastian; Kambham, Ajay Kumar

ISSN

0304-3991

Issue

6

Journal

Ultramicroscopy

Volume

111

Title

Atom probe analysis of a 3D-finfet with high-k metal gate

Publication type

Journal article

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