Publication:
Atom probe analysis of a 3D-finfet with high-k metal gate
Date
| dc.contributor.author | Gilbert, Matthieu | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Koelling, Sebastian | |
| dc.contributor.author | Kambham, Ajay Kumar | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-19T13:45:44Z | |
| dc.date.available | 2021-10-19T13:45:44Z | |
| dc.date.issued | 2011 | |
| dc.identifier.issn | 0304-3991 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18961 | |
| dc.source.beginpage | 530 | |
| dc.source.endpage | 534 | |
| dc.source.issue | 6 | |
| dc.source.journal | Ultramicroscopy | |
| dc.source.volume | 111 | |
| dc.title | Atom probe analysis of a 3D-finfet with high-k metal gate | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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