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A CMOS compatible polycrystalline silicon-germanium based piezoresistive pressure sensor

dc.contributor.authorGonzalez, Pilar
dc.contributor.authorGuo, Bin
dc.contributor.authorSeveri, Simone
dc.contributor.authorDe Meyer, Kristin
dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-10-19T13:50:26Z
dc.date.available2021-10-19T13:50:26Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18979
dc.sourceIIOimport
dc.titleA CMOS compatible polycrystalline silicon-germanium based piezoresistive pressure sensor
dc.typeProceedings paper
dc.contributor.imecauthorGonzalez, Pilar
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorDe Meyer, Kristin
dc.source.peerreviewno
dc.source.beginpage1076
dc.source.endpage1079
dc.source.conference16th International Conference on Solid-State Sensors, Actuators and Microsystems - Transducers
dc.source.conferencedate5/06/2011
dc.source.conferencelocationBeijing China
imec.availabilityPublished - imec


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