Sealing of poly-SiGe surface micromachined cavities for MEMS-above-CMOS applications

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Authors

Gonzalez, Pilar; Guo, Bin; Varela Pedreira, Olalla; Severi, Simone; De Meyer, Kristin; Witvrouw, Ann

DOI

10.1088/0960-1317/21/11/115019

ISSN

0960-1317

Issue

11

Journal

Journal of Micromechanics and Microengineering

Volume

21

Title

Sealing of poly-SiGe surface micromachined cavities for MEMS-above-CMOS applications

Publication type

Journal article

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