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Sealing of poly-SiGe surface micromachined cavities for MEMS-above-CMOS applications

dc.contributor.authorGonzalez, Pilar
dc.contributor.authorGuo, Bin
dc.contributor.authorVarela Pedreira, Olalla
dc.contributor.authorSeveri, Simone
dc.contributor.authorDe Meyer, Kristin
dc.contributor.authorWitvrouw, Ann
dc.date.accessioned2021-10-19T13:50:43Z
dc.date.available2021-10-19T13:50:43Z
dc.date.issued2011
dc.identifier.issn0960-1317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/18980
dc.sourceIIOimport
dc.titleSealing of poly-SiGe surface micromachined cavities for MEMS-above-CMOS applications
dc.typeJournal article
dc.contributor.imecauthorGonzalez, Pilar
dc.contributor.imecauthorVarela Pedreira, Olalla
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorDe Meyer, Kristin
dc.identifier.doi10.1088/0960-1317/21/11/115019
dc.source.peerreviewyes
dc.source.beginpage115019
dc.source.journalJournal of Micromechanics and Microengineering
dc.source.issue11
dc.source.volume21
imec.availabilityPublished - imec


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