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Deposition of nanodiamond-graphite-like films with a microwave electron-cyclotron resonance process
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Authors
Gushchin, Oleg
;
Orlov, Sergey
;
Baklanov, Mikhaïl
;
Yanovich, Sergey
;
Yafarov, Ravil
;
Ignatov, Ravel
;
Zaitsev, Nikolay
Conference
Nanotechitaly
Title
Deposition of nanodiamond-graphite-like films with a microwave electron-cyclotron resonance process
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Meeting abstract
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