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S-shaped double-spring structures for high stiffness and spring height

dc.contributor.authorHantschel, Thomas
dc.contributor.authorChow, Eugene
dc.date.accessioned2021-10-19T14:08:09Z
dc.date.available2021-10-19T14:08:09Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19039
dc.sourceIIOimport
dc.titleS-shaped double-spring structures for high stiffness and spring height
dc.typeOral presentation
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.source.peerreviewno
dc.source.conferenceMicro- and Nanoengineering conference - MNE
dc.source.conferencedate19/09/2011
dc.source.conferencelocationBerlin Germany
imec.availabilityPublished - imec


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