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TiN scanning probes for electrical profiling of nanoelectronics device structures

dc.contributor.authorHantschel, Thomas
dc.contributor.authorSchulze, Andreas
dc.contributor.authorCelano, Umberto
dc.contributor.authorMoussa, Alain
dc.contributor.authorArstila, Kai
dc.contributor.authorEyben, Pierre
dc.contributor.authorMajeed, Bivragh
dc.contributor.authorSabuncuoglu Tezcan, Deniz
dc.contributor.authorWerner, Thilo
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-19T14:08:48Z
dc.date.available2021-10-19T14:08:48Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19041
dc.sourceIIOimport
dc.titleTiN scanning probes for electrical profiling of nanoelectronics device structures
dc.typeOral presentation
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorCelano, Umberto
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorMajeed, Bivragh
dc.contributor.imecauthorSabuncuoglu Tezcan, Deniz
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.contributor.orcidimecCelano, Umberto::0000-0002-2856-3847
dc.contributor.orcidimecSabuncuoglu Tezcan, Deniz::0000-0002-9237-7862
dc.source.peerreviewno
dc.source.conferenceMicro- and Nanoengineering Conference - MNE
dc.source.conferencedate19/09/2011
dc.source.conferencelocationBerlin Germany
imec.availabilityPublished - imec


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