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Calibrated boron doped tip fabrication

dc.contributor.authorHantschel, Thomas
dc.contributor.authorZimmer, Jerry
dc.contributor.authorSchulze, Andreas
dc.contributor.authorEyben, Pierre
dc.contributor.authorTsigkourakos, Menelaos
dc.contributor.authorRichard, Olivier
dc.contributor.authorBender, Hugo
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-19T14:09:06Z
dc.date.available2021-10-19T14:09:06Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19042
dc.sourceIIOimport
dc.titleCalibrated boron doped tip fabrication
dc.typeProceedings paper
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.source.peerreviewno
dc.source.conferenceHasselt Diamond Workshop - SBDD XVI
dc.source.conferencedate21/03/2011
dc.source.conferencelocationHasselt Belgium
imec.availabilityPublished - imec


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