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Numerical analysis of zeptogram/Hz-level mass responsivity for in-plane resonant nano-electro-mechanical sensors

dc.contributor.authorHassani, Faezeh A.
dc.contributor.authorCobianu, Cornel
dc.contributor.authorArmini, Silvia
dc.contributor.authorPetrescu, Violeta
dc.contributor.authorMerken, Patrick
dc.contributor.authorTsamados, Dimitrios
dc.contributor.authorIonescu, Adrian
dc.contributor.authorTsuchiya, Yoshishige
dc.contributor.authorMizuta, Hiroshi
dc.date.accessioned2021-10-19T14:11:23Z
dc.date.available2021-10-19T14:11:23Z
dc.date.issued2011
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19050
dc.sourceIIOimport
dc.titleNumerical analysis of zeptogram/Hz-level mass responsivity for in-plane resonant nano-electro-mechanical sensors
dc.typeJournal article
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorMerken, Patrick
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage2879
dc.source.endpage2894
dc.source.journalMicroelectronic Engineering
dc.source.issue9
dc.source.volume88
imec.availabilityPublished - open access


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