Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Articles
Numerical analysis of zeptogram/Hz-level mass responsivity for in-plane resonant nano-electro-mechanical sensors
Publication:
Numerical analysis of zeptogram/Hz-level mass responsivity for in-plane resonant nano-electro-mechanical sensors
Date
2011
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
22462.pdf
541.07 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Hassani, Faezeh A.
;
Cobianu, Cornel
;
Armini, Silvia
;
Petrescu, Violeta
;
Merken, Patrick
;
Tsamados, Dimitrios
;
Ionescu, Adrian
;
Tsuchiya, Yoshishige
;
Mizuta, Hiroshi
Journal
Microelectronic Engineering
Abstract
Description
Metrics
Views
2035
since deposited on 2021-10-19
Acq. date: 2025-10-25
Citations
Metrics
Views
2035
since deposited on 2021-10-19
Acq. date: 2025-10-25
Citations