Publication:

Numerical analysis of zeptogram/Hz-level mass responsivity for in-plane resonant nano-electro-mechanical sensors

Date

2011
Journal article
Simple item page Full metadata Statistics
 
dc.contributor.authorHassani, Faezeh A.
dc.contributor.authorCobianu, Cornel
dc.contributor.authorArmini, Silvia
dc.contributor.authorPetrescu, Violeta
dc.contributor.authorMerken, Patrick
dc.contributor.authorTsamados, Dimitrios
dc.contributor.authorIonescu, Adrian
dc.contributor.authorTsuchiya, Yoshishige
dc.contributor.authorMizuta, Hiroshi
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorMerken, Patrick
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.date.accessioned2021-10-19T14:11:23Z
dc.date.available2021-10-19T14:11:23Z
dc.date.embargo9999-12-31
dc.date.issued2011
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19050
dc.source.beginpage2879
dc.source.endpage2894
dc.source.issue9
dc.source.journalMicroelectronic Engineering
dc.source.volume88
dc.title

Numerical analysis of zeptogram/Hz-level mass responsivity for in-plane resonant nano-electro-mechanical sensors

dc.typeJournal article
dspace.entity.typePublication
Files

Original bundle

Name:
22462.pdf
Size:
541.07 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Articles