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High pressure pump as lab on chip component for micro-fluidic integrated system

dc.contributor.authorHiraoka, Maki
dc.contributor.authorFiorini, Paolo
dc.contributor.authorYamashita, Hichiro
dc.contributor.authorVan Hoof, Chris
dc.contributor.authorOp de Beeck, Maaike
dc.date.accessioned2021-10-19T14:20:16Z
dc.date.available2021-10-19T14:20:16Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19080
dc.sourceIIOimport
dc.titleHigh pressure pump as lab on chip component for micro-fluidic integrated system
dc.typeProceedings paper
dc.contributor.imecauthorVan Hoof, Chris
dc.contributor.imecauthorOp de Beeck, Maaike
dc.contributor.orcidimecOp de Beeck, Maaike::0000-0002-2700-6432
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1139
dc.source.endpage1142
dc.source.conference24th International Conference on Micro Electro Mechanical Systems - MEMS
dc.source.conferencedate23/01/2011
dc.source.conferencelocationCancun Mexico
imec.availabilityPublished - open access


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