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Fsec laser solid interactions on nanoscale semiconducting objects and their impact on imaging with 3D-atomic resolution in the atomprobe

dc.contributor.authorInnocenti, Nicolas
dc.contributor.authorKoelling, Sebastian
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorVanderheyden, Benoit
dc.date.accessioned2021-10-19T14:28:16Z
dc.date.available2021-10-19T14:28:16Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19107
dc.sourceIIOimport
dc.titleFsec laser solid interactions on nanoscale semiconducting objects and their impact on imaging with 3D-atomic resolution in the atomprobe
dc.typeOral presentation
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceMRS Spring Meeting Symposium TT: Laser-Material Interactions at Micro/Nanoscales
dc.source.conferencedate25/04/2011
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - open access


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