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Laser ablation of AlOx and AlOx/SiNx backside passivation layers for advanced cell architectures

dc.contributor.authorJaffrennou, Périne
dc.contributor.authorMoors, Mathieu
dc.contributor.authorUruena De Castro, Angel
dc.contributor.authorDas, Jo
dc.contributor.authorDuerinckx, Filip
dc.contributor.authorPenaud, Julien
dc.contributor.authorRothschild, Aude
dc.contributor.authorLombardet, Benoit
dc.contributor.authorSzlufcik, Jozef
dc.date.accessioned2021-10-19T14:30:34Z
dc.date.available2021-10-19T14:30:34Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19114
dc.sourceIIOimport
dc.titleLaser ablation of AlOx and AlOx/SiNx backside passivation layers for advanced cell architectures
dc.typeProceedings paper
dc.contributor.imecauthorDuerinckx, Filip
dc.contributor.imecauthorSzlufcik, Jozef
dc.contributor.orcidimecDuerinckx, Filip::0000-0003-2570-7371
dc.source.peerreviewno
dc.source.conference37th IEEE Photovoltaic Specialists Conference - PVSC
dc.source.conferencedate19/06/2011
dc.source.conferencelocationSeattle, WA USA
dc.identifier.urlhttp://ieee-pvsc.org/ePVSC/planner_public/index.php#
imec.availabilityPublished - imec


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