Influence of poling on RF and pulsed DC sputtered PZT thin films
dc.contributor.author | Jambunathan, Madhu | |
dc.contributor.author | Karakaya, Koray | |
dc.contributor.author | Elfrink, Rene | |
dc.contributor.author | Vullers, Ruud | |
dc.contributor.author | van Schaijk, Rob | |
dc.date.accessioned | 2021-10-19T14:31:28Z | |
dc.date.available | 2021-10-19T14:31:28Z | |
dc.date.issued | 2011 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/19117 | |
dc.source | IIOimport | |
dc.title | Influence of poling on RF and pulsed DC sputtered PZT thin films | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Elfrink, Rene | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.conference | International Symp. on Applications of Ferroelectrics (ISAF/PFM) and International Symp. on Piezoresponse Force Microscopy ... | |
dc.source.conferencedate | 24/07/2011 | |
dc.source.conferencelocation | Vancouver, BC Canada | |
imec.availability | Published - open access |