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Optimal T-support anchoring for BAR-type BAW resonators

dc.contributor.authorJansen, Roelof
dc.contributor.authorStoffels, Steve
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorZhang, Yuchen
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorDonnay, Stephane
dc.contributor.authorSeveri, Simone
dc.contributor.authorBorremans, Jonathan
dc.contributor.authorLofrano, Melina
dc.contributor.authorVan der Plas, Geert
dc.contributor.authorVerheyen, Peter
dc.contributor.authorDe Raedt, Walter
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-19T14:33:09Z
dc.date.available2021-10-19T14:33:09Z
dc.date.issued2011-01
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19122
dc.sourceIIOimport
dc.titleOptimal T-support anchoring for BAR-type BAW resonators
dc.typeProceedings paper
dc.contributor.imecauthorJansen, Roelof
dc.contributor.imecauthorStoffels, Steve
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorDonnay, Stephane
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorLofrano, Melina
dc.contributor.imecauthorVan der Plas, Geert
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecJansen, Roelof::0000-0001-6685-4699
dc.contributor.orcidimecDonnay, Stephane::0000-0003-2489-4793
dc.contributor.orcidimecVan der Plas, Geert::0000-0002-4975-6672
dc.contributor.orcidimecDe Raedt, Walter::0000-0002-7117-7976
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.source.peerreviewyes
dc.source.beginpage609
dc.source.endpage612
dc.source.conference24th International Conference on Micro Electro Mechanical Systems - MEMS
dc.source.conferencedate23/01/2011
dc.source.conferencelocationCancun Mexico
imec.availabilityPublished - imec


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