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Resonance frequency drift in elctrostatically-driven single-crystal silicon micro-electro-mechanical resonators
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Resonance frequency drift in elctrostatically-driven single-crystal silicon micro-electro-mechanical resonators
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Date
2011-05
Dissertation
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23997.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Kalicinski, Stanislaw
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Abstract
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1922
since deposited on 2021-10-19
Acq. date: 2026-01-09
Citations
Metrics
Views
1922
since deposited on 2021-10-19
Acq. date: 2026-01-09
Citations