Publication:
Resonance frequency drift in elctrostatically-driven single-crystal silicon micro-electro-mechanical resonators
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1923 since deposited on 2021-10-19
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Acq. date: 2026-04-28
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1923 since deposited on 2021-10-19
1last month
1last week
Acq. date: 2026-04-28
Citations