Resonance frequency drift in elctrostatically-driven single-crystal silicon micro-electro-mechanical resonators

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Authors
Kalicinski, Stanislaw
Supervisor
Wevers, M.; Mertens, Robert
Title
Resonance frequency drift in elctrostatically-driven single-crystal silicon micro-electro-mechanical resonators
Publication type
PHD thesis
Embargo date
9999-12-31
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