Resonance frequency drift in elctrostatically-driven single-crystal silicon micro-electro-mechanical resonators
dc.contributor.author | Kalicinski, Stanislaw | |
dc.date.accessioned | 2021-10-19T14:43:18Z | |
dc.date.available | 2021-10-19T14:43:18Z | |
dc.date.issued | 2011-05 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/19155 | |
dc.source | IIOimport | |
dc.title | Resonance frequency drift in elctrostatically-driven single-crystal silicon micro-electro-mechanical resonators | |
dc.type | PHD thesis | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.contributor.thesisadvisor | Wevers, M. | |
dc.contributor.thesisadvisor | Mertens, Robert | |
imec.availability | Published - open access |