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Novel bi-layer poly-silicon channel vertical flash cell for ultrahigh density 3D sonos nand technology
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Authors
Kar, Gouri Sankar
;
Van den Bosch, Geert
;
Cacciato, Antonio
;
Blomme, Pieter
;
Arreghini, Antonio
;
Breuil, Laurent
;
De Keersgieter, An
;
Paraschiv, Vasile
;
Vrancken, Christa
;
Douhard, Bastien
;
Richard, Olivier
;
Debusschere, Ingrid
;
Van Houdt, Jan
;
Van Aerde, Steven
;
Tang, Baojun
Conference
3rd IEEE International Memory Workshop - IMW
Title
Novel bi-layer poly-silicon channel vertical flash cell for ultrahigh density 3D sonos nand technology
Publication type
Proceedings paper
Embargo date
9999-12-31
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