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Methodologies for sub-1nm EOT TDDB evaluatiion

dc.contributor.authorKauerauf, Thomas
dc.contributor.authorDegraeve, Robin
dc.contributor.authorRagnarsson, Lars-Ake
dc.contributor.authorRoussel, Philippe
dc.contributor.authorSahhaf, Sahar
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorO'Connor, Robert
dc.date.accessioned2021-10-19T14:46:23Z
dc.date.available2021-10-19T14:46:23Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19164
dc.sourceIIOimport
dc.titleMethodologies for sub-1nm EOT TDDB evaluatiion
dc.typeProceedings paper
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorRagnarsson, Lars-Ake
dc.contributor.imecauthorRoussel, Philippe
dc.contributor.imecauthorSahhaf, Sahar
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.orcidimecRagnarsson, Lars-Ake::0000-0003-1057-8140
dc.contributor.orcidimecRoussel, Philippe::0000-0002-0402-8225
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage7
dc.source.endpage16
dc.source.conferenceIEEE International Reliability Physics Symposium - IRPS
dc.source.conferencedate10/04/2011
dc.source.conferencelocationMonterey, CA USA
imec.availabilityPublished - open access
imec.internalnotes2A.2


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