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TEM study of carbon nanotube interconnects

dc.contributor.authorKe, Xiaoxing
dc.contributor.authorChiodarelli, Nicolo
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorVereecke, Bart
dc.contributor.authorHantschel, Thomas
dc.contributor.authorBals, S.
dc.contributor.authorVan Tendeloo, G.
dc.date.accessioned2021-10-19T14:47:00Z
dc.date.available2021-10-19T14:47:00Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19166
dc.sourceIIOimport
dc.titleTEM study of carbon nanotube interconnects
dc.typeMeeting abstract
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorVereecke, Bart
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.source.peerreviewno
dc.source.conferenceWorkshop on Graphene and Carbon Nanotubes
dc.source.conferencedate23/09/2011
dc.source.conferencelocationLeuven Belgium
imec.availabilityPublished - imec


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