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PR and BARC wet strip in BEOl patterning using a UV-enabled aqueous process

dc.contributor.authorKesters, Els
dc.contributor.authorLe, Quoc Toan
dc.contributor.authorLux, Marcel
dc.contributor.authorVereecke, Guy
dc.contributor.authorStruyf, Herbert
dc.contributor.authorDe Gendt, Stefan
dc.date.accessioned2021-10-19T14:47:20Z
dc.date.available2021-10-19T14:47:20Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19167
dc.sourceIIOimport
dc.titlePR and BARC wet strip in BEOl patterning using a UV-enabled aqueous process
dc.typeProceedings paper
dc.contributor.imecauthorKesters, Els
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorLux, Marcel
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewno
dc.source.beginpage269
dc.source.endpage276
dc.source.conferenceCleaning Science and Technology 12
dc.source.conferencedate9/10/2011
dc.source.conferencelocationBoston, MA USA
imec.availabilityPublished - imec
imec.internalnotesECS Transactions; VOl. 41, Issue 5


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