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Three dimensional compositional analysis of semiconductors with the Atom Probe

dc.contributor.authorKoelling, Sebastian
dc.date.accessioned2021-10-19T14:55:05Z
dc.date.available2021-10-19T14:55:05Z
dc.date.issued2011-12
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19191
dc.sourceIIOimport
dc.titleThree dimensional compositional analysis of semiconductors with the Atom Probe
dc.typePHD thesis
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.contributor.thesisadvisorVandervorst, Wilfried
imec.availabilityPublished - open access


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