dc.contributor.author | Kuppuswamy, Vijaya Kumar Murugesan | |
dc.contributor.author | Constantoudis, Vassilios | |
dc.contributor.author | Gogolides, Evangelos | |
dc.contributor.author | Vaglio Pret, Alessandro | |
dc.contributor.author | Gronheid, Roel | |
dc.date.accessioned | 2021-10-19T15:01:01Z | |
dc.date.available | 2021-10-19T15:01:01Z | |
dc.date.issued | 2011 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/19208 | |
dc.source | IIOimport | |
dc.title | Contact edge roughness: effects of dose and PAG concentration in EUV lithography | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Vaglio Pret, Alessandro | |
dc.contributor.imecauthor | Gronheid, Roel | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.conference | 37th International Conference on Micro and Nano Engineering - MNE | |
dc.source.conferencedate | 19/09/2011 | |
dc.source.conferencelocation | Berlin Germany | |
imec.availability | Published - open access | |