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Contact-edge roughness (CER) characterization and modeling: effect of dose on CER and crtitical dimension uniformity

dc.contributor.authorKuppuswamy, Vijaya-Kumar Murugesan
dc.contributor.authorConstantoudis, Vassilios
dc.contributor.authorGogolides, Evangelos
dc.contributor.authorGronheid, Roel
dc.contributor.authorVaglio Pret, Alessandro
dc.date.accessioned2021-10-19T15:01:20Z
dc.date.available2021-10-19T15:01:20Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19209
dc.sourceIIOimport
dc.titleContact-edge roughness (CER) characterization and modeling: effect of dose on CER and crtitical dimension uniformity
dc.typeProceedings paper
dc.contributor.imecauthorGronheid, Roel
dc.contributor.imecauthorVaglio Pret, Alessandro
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage79710Q
dc.source.conferenceMetrology, Inspection, and Process Control XXV
dc.source.conferencedate27/02/2011
dc.source.conferencelocationSan Jose, CA USA
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 7971


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