Depth profiling of Al2O3 + TiO2 nanolaminates by means of a time-of-flight energy spectrometer
| dc.contributor.author | Laitinen, M. | |
| dc.contributor.author | Sajavaara, T. | |
| dc.contributor.author | Rossi, M. | |
| dc.contributor.author | Julin, J. | |
| dc.contributor.author | Puurunen, R.L. | |
| dc.contributor.author | Suni, T. | |
| dc.contributor.author | Ishida, T. | |
| dc.contributor.author | Fujita, H. | |
| dc.contributor.author | Brijs, Bert | |
| dc.contributor.author | Whitlow, H.J. | |
| dc.date.accessioned | 2021-10-19T15:10:55Z | |
| dc.date.available | 2021-10-19T15:10:55Z | |
| dc.date.issued | 2011 | |
| dc.identifier.issn | 0168-583X | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/19238 | |
| dc.source | IIOimport | |
| dc.title | Depth profiling of Al2O3 + TiO2 nanolaminates by means of a time-of-flight energy spectrometer | |
| dc.type | Journal article | |
| dc.source.peerreview | yes | |
| dc.source.beginpage | 3021 | |
| dc.source.endpage | 3024 | |
| dc.source.journal | Nuclear Instruments and Methods in Physics Research B | |
| dc.source.issue | 24 | |
| dc.source.volume | 269 | |
| imec.availability | Published - imec | |
| imec.internalnotes | Paper of ECAART 2010 |
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