Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Articles
Depth profiling of Al2O3 + TiO2 nanolaminates by means of a time-of-flight energy spectrometer
Publication:
Depth profiling of Al2O3 + TiO2 nanolaminates by means of a time-of-flight energy spectrometer
Copy permalink
Date
2011
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Laitinen, M.
;
Sajavaara, T.
;
Rossi, M.
;
Julin, J.
;
Puurunen, R.L.
;
Suni, T.
;
Ishida, T.
;
Fujita, H.
;
Brijs, Bert
;
Whitlow, H.J.
Journal
Nuclear Instruments and Methods in Physics Research B
Abstract
Description
Metrics
Views
1858
since deposited on 2021-10-19
Acq. date: 2025-12-09
Citations
Metrics
Views
1858
since deposited on 2021-10-19
Acq. date: 2025-12-09
Citations