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Depth profiling of Al2O3 + TiO2 nanolaminates by means of a time-of-flight energy spectrometer
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Authors
Laitinen, M.
;
Sajavaara, T.
;
Rossi, M.
;
Julin, J.
;
Puurunen, R.L.
;
Suni, T.
;
Ishida, T.
;
Fujita, H.
;
Brijs, Bert
;
Whitlow, H.J.
ISSN
0168-583X
Issue
24
Journal
Nuclear Instruments and Methods in Physics Research B
Volume
269
Title
Depth profiling of Al2O3 + TiO2 nanolaminates by means of a time-of-flight energy spectrometer
Publication type
Journal article
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