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Extreme ultraviolet (EUV) degradation of poly(olefin sulfone)s: towards applications as EUV photoresists

dc.contributor.authorLawrie, Kirsten
dc.contributor.authorBlakey, Idriss
dc.contributor.authorBlinco, James
dc.contributor.authorGronheid, Roel
dc.contributor.authorJack, Kevin
dc.contributor.authorPollentier, Ivan
dc.contributor.authorLeeson, Michael
dc.contributor.authorYounkin, Todd
dc.contributor.authorWhittaker, Andrew K.
dc.date.accessioned2021-10-19T15:15:43Z
dc.date.available2021-10-19T15:15:43Z
dc.date.issued2011
dc.identifier.issn0969-806X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19253
dc.sourceIIOimport
dc.titleExtreme ultraviolet (EUV) degradation of poly(olefin sulfone)s: towards applications as EUV photoresists
dc.typeJournal article
dc.contributor.imecauthorGronheid, Roel
dc.contributor.imecauthorPollentier, Ivan
dc.contributor.orcidimecPollentier, Ivan::0000-0002-4266-6500
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage236
dc.source.endpage241
dc.source.journalRadiation Physics and Chemistry
dc.source.issue2
dc.source.volume80
imec.availabilityPublished - open access
imec.internalnotesRadiation Modification of Polymers, 11th Pacific Polymer Conference, 6-10 December 2009, Cairns, Australia


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