Authors

Lawrie, Kirsten; Blakey, Idriss; Blinco, James; Gronheid, Roel; Jack, Kevin; Pollentier, Ivan; Leeson, Michael; Younkin, Todd; Whittaker, Andrew K.

ISSN

0969-806X

Issue

2

Journal

Radiation Physics and Chemistry

Volume

80

Title

Extreme ultraviolet (EUV) degradation of poly(olefin sulfone)s: towards applications as EUV photoresists

Publication type

Journal article

Embargo date

9999-12-31