Extreme ultraviolet (EUV) degradation of poly(olefin sulfone)s: towards applications as EUV photoresists

dc.contributor.author	Lawrie, Kirsten
dc.contributor.author	Blakey, Idriss
dc.contributor.author	Blinco, James
dc.contributor.author	Gronheid, Roel
dc.contributor.author	Jack, Kevin
dc.contributor.author	Pollentier, Ivan
dc.contributor.author	Leeson, Michael
dc.contributor.author	Younkin, Todd
dc.contributor.author	Whittaker, Andrew K.
dc.contributor.imecauthor	Gronheid, Roel
dc.contributor.imecauthor	Pollentier, Ivan
dc.contributor.orcidimec	Pollentier, Ivan::0000-0002-4266-6500
dc.date.accessioned	2021-10-19T15:15:43Z
dc.date.available	2021-10-19T15:15:43Z
dc.date.embargo	9999-12-31
dc.date.issued	2011
dc.identifier.issn	0969-806X
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/19253
dc.source.beginpage	236
dc.source.endpage	241
dc.source.issue	2
dc.source.journal	Radiation Physics and Chemistry
dc.source.volume	80
dc.title	Extreme ultraviolet (EUV) degradation of poly(olefin sulfone)s: towards applications as EUV photoresists
dc.type	Journal article
dspace.entity.type	Publication
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