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Extreme ultraviolet (EUV) degradation of poly(olefin sulfone)s: towards applications as EUV photoresists
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1990 since deposited on 2021-10-19
1last month
Acq. date: 2025-12-11
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Metrics
Views
1990 since deposited on 2021-10-19
1last month
Acq. date: 2025-12-11
Citations