Show simple item record

450 mm: from plan to reality

dc.contributor.authorLebon, Hans
dc.date.accessioned2021-10-19T15:19:03Z
dc.date.available2021-10-19T15:19:03Z
dc.date.issued2011
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/19263
dc.sourceIIOimport
dc.title450 mm: from plan to reality
dc.typeOral presentation
dc.contributor.imecauthorLebon, Hans
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceSemicon Europa
dc.source.conferencedate11/10/2011
dc.source.conferencelocationDresden Germany
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
23647.pdf
Size:
1.511Mb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record