450 mm: from plan to reality
dc.contributor.author | Lebon, Hans | |
dc.date.accessioned | 2021-10-19T15:19:03Z | |
dc.date.available | 2021-10-19T15:19:03Z | |
dc.date.issued | 2011 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/19263 | |
dc.source | IIOimport | |
dc.title | 450 mm: from plan to reality | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Lebon, Hans | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.conference | Semicon Europa | |
dc.source.conferencedate | 11/10/2011 | |
dc.source.conferencelocation | Dresden Germany | |
imec.availability | Published - open access |