450 mm: from plan to reality
dc.contributor.author | Lebon, Hans | |
dc.date.accessioned | 2021-10-19T15:19:20Z | |
dc.date.available | 2021-10-19T15:19:20Z | |
dc.date.issued | 2011 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/19264 | |
dc.source | IIOimport | |
dc.title | 450 mm: from plan to reality | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Lebon, Hans | |
dc.source.peerreview | no | |
dc.source.conference | Semicon West | |
dc.source.conferencedate | 14/07/2011 | |
dc.source.conferencelocation | San Francisco, CA USA | |
imec.availability | Published - imec |
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